FMFV
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FELTON’s high-precision FMFV is based on the Pressure-Operated Flow (POR) method. It measures flow rate Q by determining the relationship between pressure rise and temperature T (where r is the gas constant). By employing sonic nozzle technology, the influence of external volumes on verification accuracy is eliminated. With a repeat measurement accuracy of ±0.5% of the reading, the FMFV can verify MFC flow rates using actual process gases, and its repeatability is significantly superior to that of conventional rise-rate devices or cavity-rise methods.
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- Commodity name: FMFV
<p> FELTON’s high-precision FMFV is based on the Pressure-Operated Flow (POR) method. It measures flow rate Q by determining the relationship between pressure rise and temperature T (where r is the gas constant). By employing sonic nozzle technology, the influence of external volumes on verification accuracy is eliminated. With a repeat measurement accuracy of ±0.5% of the reading, the FMFV can verify MFC flow rates using actual process gases, and its repeatability is significantly superior to that of conventional rise-rate devices or cavity-rise methods. <p></p></p>
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