FFV

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The FFV is a compact flow calibrator specifically designed for the gas supply systems of semiconductor manufacturing equipment. It employs the build-up method for flow measurement. Its main components include an actuated on-off valve (AOV), a pressure sensor, a temperature sensor, and a control circuit.

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应用案例

- Commodity name: FFV
<p> The FFV is a compact flow calibrator specifically designed for the gas supply systems of semiconductor manufacturing equipment. It employs the build-up method for flow measurement. Its main components include an actuated on-off valve (AOV), a pressure sensor, a temperature sensor, and a control circuit. <p></p></p>

Product features:

· Compact design, suitable for installation on gas box Inside;

·Complies with electromagnetic compatibility (EMC) Standard
- 规格参数
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FMFV

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