UPC

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The FELTON UPC series products are wafer backside pressure controllers developed by Felton Technology (Shanghai) Co., Ltd. They integrate mass flow measurement technology with pressure control technology, enabling rapid response and stable control of set pressures while also allowing for precise detection of the flow rate of cooling gas streams.

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产品描述
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特点&优势
技术参数
应用案例

- Commodity name: UPC
<p> The FELTON UPC series products are wafer backside pressure controllers developed by Felton Technology (Shanghai) Co., Ltd. They integrate mass flow measurement technology with pressure control technology, enabling rapid response and stable control of set pressures while also allowing for precise detection of the flow rate of cooling gas streams. <p></p></p>

Product Features

· High-precision pressure detection: Employs a temperature-compensation algorithm to significantly enhance pressure accuracy.

and consistency.

· High-precision flow detection: Built-in flow sensor for cooling. Precise monitoring of gas flow, with support for 10-point calibration. Yes, it can improve flow accuracy.

· Convenient parameter tuning: Supports online operation on the host computer. PID Parameter tuning function, easy to operate and highly adaptable to various operating conditions.
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BPC

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