Flow Ratio Distributor FFD1000-Ⅲ
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The Flow Ratio Distributor (FFD) is equipped with multiple Mass Flow Controllers (MFCs), enabling simultaneous adjustment and independent control of flow rates according to user-specified ratios. This allows the mixed gases to be proportionally distributed into multiple streams, which are then directed to various chambers or zones within the process chamber, thereby optimizing process uniformity and repeatability. Operating Principle: The control system measures and compares the flow rates of different fluids, then adjusts the opening degrees of individual valves based on pre-set ratios. The Flow Ratio Controller is primarily used in various fluid distribution applications such as etching, photoresist stripping, and PECVD processes. In process chambers, it distributes gases or mixed gases into different zones according to specified ratios.
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- Commodity name: Flow Ratio Distributor FFD1000-Ⅲ
<p> The Flow Ratio Distributor (FFD) is equipped with multiple Mass Flow Controllers (MFCs), enabling simultaneous adjustment and independent control of flow rates according to user-specified ratios. This allows the mixed gases to be proportionally distributed into multiple streams, which are then directed to various chambers or zones within the process chamber, thereby optimizing process uniformity and repeatability. Operating Principle: The control system measures and compares the flow rates of different fluids, then adjusts the opening degrees of individual valves based on pre-set ratios. The Flow Ratio Controller is primarily used in various fluid distribution applications such as etching, photoresist stripping, and PECVD processes. In process chambers, it distributes gases or mixed gases into different zones according to specified ratios. <p></p></p>
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