HCE系列
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The HCE series high-temperature mass flow controller (MFC) is a device designed specifically for precise control of gas flow in high-temperature environments, widely used in the semiconductor manufacturing field.
- 产品描述
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- 特点&优势
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- 应用案例
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- Commodity name: HCE系列
<p>The HCE series high-temperature mass flow controller (MFC) is a device designed specifically for precise control of gas flow in high-temperature environments, widely used in the semiconductor manufacturing field. <p>
Product Features:
● Adaptation to high temperature environments;
● High precision and fast response;
● Multiple gas compatibility to meet the needs of various process gases;
● Corrosion resistant design;
● Provide digital interfaces (such as RS485 or EtherCAT) for easy integration with process equipment -
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规格参数
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