Vacuum butterfly valve

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Vacuum butterfly valves offer excellent pressure control performance. With their fast and precise actuator, vacuum butterfly valves are an ideal solution for vacuum pressure control in industrial processes such as semiconductor manufacturing, flat-panel display production, and photovoltaic technology.
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    • Commodity name: Vacuum butterfly valve

    Vacuum butterfly valves offer excellent pressure control performance. With their fast and precise actuator, vacuum butterfly valves are an ideal solution for vacuum pressure control in industrial processes such as semiconductor manufacturing, flat-panel display production, and photovoltaic technology.

    • 规格参数

      • 规格参数
  • Excellent pressure control accuracy

    By combining the self-learning function with adaptive control algorithms,   Can quickly and accurately reach the target pressure.

    Dual-channel adaptive pressure matching technology

    Supports two-channel vacuum gauge signal inputs, customizable according to process requirements.   Automatically select different ranges or use vacuum via cross-mode.   Standardize input values to improve the accuracy of pressure readings.

    High positional accuracy

    Equipped with 5000-line optical incremental encoder, position resolution Up to 12800 (90°)

    ● Meeting customized application requirements for advanced processes

    We can customize different types of flanges according to customer process requirements. Model, material type, and special features

     

    Supports digital input and output as well as analog output. Supports time ramp and slope ramp functions.

            The operating status of the valve body can be effectively and in real time controlled and monitored. Can effectively address the overshoot issue in pressure regulation during the process.

     

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